摘要 |
PURPOSE: A vacuum insulation material leakage inspection method and an inspection apparatus using the same are provided to inspect for a leakage on a wide area in a short time through a head part, thereby reducing costs and work time. CONSTITUTION: A vacuum insulation material leakage inspection method is comprised of the following procedures. A helium gas is injected inside of a vacuum insulation material which needs to be maintained in a vacuum state(S110). An external gas of the vacuum insulation material is inhaled. The helium gas is detected among the inhaled gas(S120). The inhaled gas is ionized by an electron generated by a filament(S121). An ionized molecules is deflected with a fixed angle by a magnetic field according to the mass of the ionized molecule(S122). The ionized molecules with a deflection radius appropriate to a helium mass is collected(S123). |