WAFER SUPPORTING UNIT AND METHOD FOR TEACHING TRANSFER ROBOT USING THE WAFER SUPPORTING UNIT

摘要

PURPOSE: A substrate support unit and a transfer robot teaching method using the same are provided to shorten transfer robot teaching time by changing the teaching value of a transfer robot according to a loading position control value of a substrate. CONSTITUTION: A substrate support unit(200) is arranged in a chamber(100) and supports a substrate. The chamber includes a chamber body(110) and a chamber lid(120). A gas spray unit(300) sprays process gas to the chamber and includes a top plate(310) with a gas supply part(312) and a bottom plate(320). A transfer robot(400) transfers the substrate to the substrate support unit.