发明名称 TFT SUBSTRATE AND MANUFACTURING METHOD THEREOF
摘要 A substrate for a thin film transistor and a manufacturing method thereof are provided to minimize signal delay of a data line by preventing a line width of the data line from being shortened in the process of patterning a data interconnection layer. A semiconductor layer(120) is formed on an insulation substrate, and is divided into a high-concentration impurity region, a low-concentration impurity region and a channel region. A gate insulating layer(130) is formed on the semiconductor layer, and has a first gate contact(161) and a second gate contact(162). A barrier layer(150) is formed on the first and second contacts. A gate electrode(142) is formed on a portion corresponding to the channel region over the gate insulating layer. A protective layer(160) is formed on the gate electrode, and has a first protective layer contact and a second protective layer contact. A pixel electrode(171) and a data lower layer(172) are formed on the protective layer, and contacts the barrier layer via the first and second protective layer contacts.
申请公布号 KR101277220(B1) 申请公布日期 2013.06.24
申请号 KR20060117976 申请日期 2006.11.27
申请人 发明人
分类号 G02F1/133;H01L29/786 主分类号 G02F1/133
代理机构 代理人
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