摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pressure sensor capable of reducing leak of isolation fluid and improving reliability. <P>SOLUTION: A pressure sensor includes a housing 1, a pressure lead-in pipe 11 leading a pressure into the housing 1, a sensor chip 2 which is installed at a portion of the housing 1 communicating with the pressure lead-in pipe 11 and detects the pressure applied, an isolation fluid 10 filled in the pressure lead-in pipe 11 and isolating the sensor chip 2 from the external environment, and a fluid retaining part 12 composed of a porous member, positioned inside the pressure lead-in pipe 11, and retaining the isolation fluid 10 within the pressure lead-in pipe 11. <P>COPYRIGHT: (C)2013,JPO&INPIT |