| 摘要 |
<p>PURPOSE: An inertia sensor is provided to prevent the permeation of moisture or water into piezoelectric bodies by sealing the piezoelectric bodies with a second electrode formed to be integrated, thereby preventing a change in properties or the separation of the piezoelectric bodies. CONSTITUTION: An inertia sensor(100) comprises a membrane(110), a first electrode(120), piezoelectric bodies(130,133,135), and a second electrode(140). The first electrode is formed by being patterned into several pieces on the membrane. The piezoelectric bodies are formed by being patterned on the first electrode. The second electrode is formed into to be integrated for covering the piezoelectric bodies.</p> |
