| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a practical method and apparatus by which recovered helium gas can be purified to high purity at a low cost. <P>SOLUTION: Hydrocarbons are removed by adsorption with activated carbon from helium gas in which the amount of oxygen as an impurity is larger than the amount required to react with all of hydrogen, carbon monoxide and hydrocarbons as impurities. Oxygen among the impurities is reacted with hydrogen, carbon monoxide and remaining hydrocarbons in the presence of palladium or rhodium as a catalyst. Hydrogen is added in such an amount that the molar concentration of hydrogen in the helium gas does not exceed two times the molar concentration of remaining oxygen, reaction is caused in the presence of palladium, platinum or rhodium as a catalyst, and the water content is reduced with a dehydration apparatus. Carbon monoxide is added in a molar concentration exceeding two times the molar concentration of remaining oxygen, oxygen is reacted with carbon monoxide in the presence of ruthenium, palladium or rhodium as a catalyst, and carbon monoxide, carbon dioxide, nitrogen and water in the helium gas are adsorbed on activated alumina and zeolite by pressure swing adsorption. <P>COPYRIGHT: (C)2013,JPO&INPIT |
