| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a discharge electrode in which decrease in a generation amount of active species is suppressed, and to provide an active species generation unit and an active species generator using the same. <P>SOLUTION: In a discharge electrode 15, the tip side of a metal columnar body has a conical shape the diameter of which decreases gradually toward the tip, and since the tip has a hemispherical shape formed by polishing, the area of the tip surface increases as the tip is retracted after long time use while holding the hemispherical surface. The dischargeable area does not decrease substantially even if the area of an electric failure conductive film (formed of suspended matters in the air) increases on the tip surface. As a result, corona discharge does not decrease and generation of active species can be stabilized. <P>COPYRIGHT: (C)2013,JPO&INPIT |
