| 摘要 |
PURPOSE: A deposition apparatus for manufacturing an organic light emitting device is provided to reduce electric energy by instantaneously heating deposition materials in a tray using a heat source. CONSTITUTION: A processed substrate(S) is installed on the upper side of a deposition chamber. A tray(110) is arranged in the deposition chamber. The tray receives deposition materials coated with a preset thickness. A heat source generating unit(130) supplies a heat source to the tray and evaporates the deposition materials coated on the tray. |
