IMPRINTING STAMP AND NANO-IMPRINT METHOD USING THE SAME

摘要

PURPOSE: An imprinting stamp and a nano-imprint method using the same are provided to prevent from bubble trapping generated in a nano-imprint process by introducing a dummy pattern with a shape concerning the flowing direction of imprinting resin. CONSTITUTION: An imprinting stamp comprises a first substrate, a field area, and a dummy pattern area. The field area is formed on the first substrate and includes a nano pattern. The dummy pattern area is formed to be adjacent in the field area of the first substrate and includes a dummy pattern which is greater than the nano pattern by scale. The dummy pattern is formed in a polygonal array with a plurality of sharp vertexes to the first direction facing the dummy pattern area from the field area. [Reference numerals] (AA) Flow direction