LINEAR EVAPORATING SOURCE AND DEPOSITION APPARATUS COMPRISING THE SAME

摘要

PURPOSE: A linear injection part and a deposition device including the same are provided to improve the uniformity of a thin film by controlling uniformity in a setting level by an insertion cap. CONSTITUTION: A body has an opening part on one side. The body has one or more gas inlets and a diffusion space. An injection plate(120) is combined with the body. The injection plate has a plurality of injection parts. An insertion cap(130) controls the injection amount of the corresponding injection part.