发明名称 POLYCRYSTALLINE SILICON PORTION AND METHOD FOR BREAKING A SILICON BODY
摘要 <p>The invention relates to a polycrystalline silicon portion having at least one fracture surface or cut surface, which comprises metal contamination of from 0.07 ng/cm2 to 1 ng/cm2. The invention also relates to a method for breaking a silicon body, preferably a rod of polycrystalline silicon, comprising the steps: a) determining the lowest natural bending frequency of the silicon body; b) exciting the silicon body in its lowest natural bending frequency by means of an oscillation generator, the excitation being carried out at an excitation point of the silicon body such that the silicon body breaks at the excitation point; so that a silicon portion having a fracture surface results which comprises metal contamination of from 0.07 ng/cm2 to 1 ng/cm2.</p>
申请公布号 CA2795822(A1) 申请公布日期 2013.06.21
申请号 CA20122795822 申请日期 2012.11.16
申请人 WACKER CHEMIE AG 发明人 FABRY, LASZLO;GRUEBL, PETER;HUBER, CHRISTIAN
分类号 C01B33/02;B26F3/00 主分类号 C01B33/02
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