| 摘要 |
PURPOSE: A system and method for preventing damage to a wafer using a pressure sensing method of a wafer lifter cylinder are provided to maintain optimal pressure by using a solenoid valve. CONSTITUTION: A pneumatic actuator is formed on the lower side of a lifter. A wafer lifter cylinder(14) lifts the lifter. A lifting pin(16) supports the rear side of a wafer. A refrigerant(17) cools the wafer lifter cylinder. A control unit is composed of a sensor, a pressure transducer, a switching valve, and a control panel.
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