LIBRARY GENERATION WITH DERIVATIVES IN OPTICAL METROLOGY

摘要

Methods of library generation with derivatives for optical metrology are described. For example, a method of generating a library for optical metrology includes determining a function of a parameter data set for one or more repeating structures on a semiconductor substrate or wafer. The method also includes determining a first derivative of the function of the parameter data set. The method also includes providing a spectral library based on both the function and the first derivative of the function.