发明名称 |
High Conductivity Electrostatic Chuck |
摘要 |
In accordance with an embodiment of the invention, there is provided an electrostatic chuck comprising a conductive path covering at least a portion of a workpiece-contacting surface of a gas seal ring of the electrostatic chuck, the conductive path comprising at least a portion of an electrical path to ground; and a main field area of a workpiece-contacting surface of the electrostatic chuck comprising a surface resistivity in the range of from about 108 to about 1012 ohms per square.
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申请公布号 |
US2013155569(A1) |
申请公布日期 |
2013.06.20 |
申请号 |
US201113818339 |
申请日期 |
2011.09.08 |
申请人 |
SUURONEN DAVID;STONE LYUDMILA;BLAKE JULIAN;STONE DALE K.;COOKE RICHARD A.;DONNELL STEVEN;VENKATRAMAN CHANDRA;VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.;ENTEGRIS, INC. |
发明人 |
SUURONEN DAVID;STONE LYUDMILA;BLAKE JULIAN;STONE DALE K.;COOKE RICHARD A.;DONNELL STEVEN;VENKATRAMAN CHANDRA |
分类号 |
H02N13/00 |
主分类号 |
H02N13/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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