| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing an oxide superconducting thin film wiring material according to FF-MOD method by which a thick oxide superconducting thin film having sufficiently high Ic can be obtained with stability. <P>SOLUTION: In the method for manufacturing an oxide superconducting wiring material, a liquid solution of an organic metal compound containing no fluorine is used to form an oxide superconducting thin film on a metal substrate according to MOD method, thereby manufacturing the oxide superconducting wiring material. The method comprises: a coating film-preparing step where a coating film is prepared by coating the metal substrate with the organic metal compound liquid solution, followed by drying; a preliminary baking heat treatment step where a preliminarily baked film is prepared by heating the coating film to thermally decompose the organic metal compound, thereby removing an organic component; and a primary baking heat treatment step where an oxide superconducting thin film is prepared by heating and crystallizing the preliminarily baked film. In the method, chlorine of 2 ppm or more to less than 2000 ppm to a total metal ion mass is added to the organic metal compound liquid solution. The primary baking heat treatment is performed after having prepared the preliminarily baked film with a thickness of 0.5 μm or larger. <P>COPYRIGHT: (C)2013,JPO&INPIT |
