| 摘要 |
The present invention relates to methods for sealing cavities in micro- electronic/-mechanical system (MEMS) devices to provide a controlled atmosphere within the sealed cavity. The method comprises providing a semiconductor substrate on which a template is provided on a localized area of the substrate. The template defines the interior shape of said cavity. Holes are made so as to enable venting of the cavity to provide a desired atmosphere to enter into the cavity through said hole. Finally, a sealing material is provided in the hole to seal the cavity. The sealing can be made by compression and/or melting of the sealing material. |
