发明名称 UNIVERSAL ENCAPSULATION SUBSTRATE, ENCAPSULATION STRUCTURE AND ENCAPSULATION METHOD
摘要 A universal encapsulation substrate (10), comprising a first substrate (102) and a silicon insertion layer (103); a plurality of projections (106) are formed between the upper surface of the first substrate and the bottom surface of the silicon insertion layer and electrically connect the same; a plurality of wiring bond pads are formed on the upper surface of the silicon insertion layer and are electrically connected to the plurality of projections respectively via silicon through holes (105). Also disclosed are an encapsulation structure provided with the encapsulating substrate and an encapsulation method. The substrate is suitable for small-batch integrated circuit products, providing low cost and short cycle for encapsulation.
申请公布号 WO2013086754(A1) 申请公布日期 2013.06.20
申请号 WO2011CN84495 申请日期 2011.12.23
申请人 TSINGHUA UNIVERSITY;CAI, JIAN;PU, YUANYUAN;WANG, QIAN;GUO, HAN 发明人 CAI, JIAN;PU, YUANYUAN;WANG, QIAN;GUO, HAN
分类号 H01L23/488 主分类号 H01L23/488
代理机构 代理人
主权项
地址