METHOD FOR DETERMINING THE QUALITY OF A SILICON WAFER

摘要

The invention relates to a method for determining the quality of a silicon wafer having a monocrystalline share in regions; the silicon wafer is to be processed for producing a semiconductor component. In order to enable a prediction of the performance to be expected of the semiconductor component, the invention states that a share of the surface of the monocrystalline region is considered when determining the quality.