发明名称 |
COMBINATORIAL RF BIAS METHOD FOR PVD |
摘要 |
<p>In some embodiments of the present invention, a shield is provided wherein the shield comprises a ceramic insulation material. The ceramic insulation material fills the space between the shield and the substrate surface and maintains a gap of less than about 2 mm and advantageously, less than about 1 mm. The shield may further be connected to ground through a low-pass filter operable to prevent the loss of high frequency RF power through the shield to ground but allow the dissipation of charge from the shield to ground through a low frequency or DC signal. In some embodiments, the ceramic insulating material further comprises a removable ceramic insert. The ceramic insert may be used to select the size of the aperture. The ceramic insert further comprises a slot operable to isolate the bottom lip of the ceramic insert from the upper portion for a PVD deposition.</p> |
申请公布号 |
WO2013090001(A1) |
申请公布日期 |
2013.06.20 |
申请号 |
WO2012US66532 |
申请日期 |
2012.11.26 |
申请人 |
INTERMOLECULAR, INC. |
发明人 |
SHAO, SHOUQIAN;CHILD, KENT;TSUNG, JAMES;YANG, HONG SHENG |
分类号 |
C23C16/04 |
主分类号 |
C23C16/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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