发明名称 |
METHOD AND APPARATUS FOR MONITORING AND CONTROLLING CRYSTAL GROWTH, AND PROBE SYSTEM |
摘要 |
In a method for monitoring and controlling crystal growth during a crystal growing procedure, heights of a plurality of measuring points on a solid-liquid interface of a crystal material disposed in a crucible are measured, and at least one parameter of the crystal growing procedure is optimized based on the measured heights, so that the solid-liquid interface maintains a dome shape with a predetermined curvature during the crystal growing procedure. |
申请公布号 |
US2013152850(A1) |
申请公布日期 |
2013.06.20 |
申请号 |
US201213556082 |
申请日期 |
2012.07.23 |
申请人 |
HSIEH CHIA-YING;CHANG CHI-HAO;HU HSIN-HWA |
发明人 |
HSIEH CHIA-YING;CHANG CHI-HAO;HU HSIN-HWA |
分类号 |
C30B19/10 |
主分类号 |
C30B19/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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