发明名称 |
SUBSTRATE HOLDING DEVICE AND METHOD, AND INSPECTION APPARATUS AND METHOD USING THE SUBSTRATE HOLDING DEVICE AND METHOD |
摘要 |
Non-contact type displacement sensors which measure the height of a substrate surface are installed above the substrate in order to hold the upper surface of the substrate at a desired height or to maintain the flatness of the substrate. A substrate mounting device is such that a plurality of grooves and of barriers are provided on the upper surface of a table and air is supplied between the substrate and the table to enable the pressure of air to displace the substrate. In addition, the substrate mounting device has such a structure as to make it possible to deform the substrate into an arbitrary convex-concave shape or to make the substrate flat by feeding back the output of the displacement sensor. |
申请公布号 |
US2013154675(A1) |
申请公布日期 |
2013.06.20 |
申请号 |
US201113580473 |
申请日期 |
2011.01.14 |
申请人 |
MIYAZAKI YUSUKE;AIKO KENJI;IIJIMA YUICHIRO;KATO YUICHIRO;HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
MIYAZAKI YUSUKE;AIKO KENJI;IIJIMA YUICHIRO;KATO YUICHIRO |
分类号 |
G01R31/00 |
主分类号 |
G01R31/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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