OPTICAL SYSTEM AND METHOD FOR INSPECTION OF PATTERNED SAMPLES

摘要

PURPOSE: An optical system for inspecting patterned samples and a method thereof are provided to optimize valid collecting zone/domain as blocking diffracted optical components from a periodic pattern of a sample effectively. CONSTITUTION: An illumination unit includes an illumination mask (42) located in a first spectrum plane about an inspection plane. The illumination mask includes a first predetermined discontinuous pattern. A light collection unit includes a collection mask (25) located in a second spectrum plane of the inspection plane which is a conjugate of the first spectrum plane. The collection mask includes a second predetermined pattern of separated light cut-off regions.