发明名称 SHEET APPLICATION APPARATUS AND APPLICATION METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a sheet application apparatus and an application method which enable an adhesive sheet to be applied to an adherend without causing wrinkles and looseness in a surface of the adhesive sheet. <P>SOLUTION: A sheet application apparatus includes: holding means 12 holding a ring frame FR having an opening FRa; sheet supply means 14 feeding an adhesive sheet AS; pressing means 16 applying pressing force to the adhesive sheet AS to place the adhesive sheet AS in contact with the ring frame FR; moving means 18 relatively moving the pressing means and the holding means; and deformation force application means 20 applying deformation force to the ring frame FR when the adhesive sheet AS is applied to the ring frame FR. After the adhesive sheet AS is applied, the application of the deformation force is terminated. These processes prevent the occurence of wrinkles or the like which are caused by tensile force occurring when the adhesive sheet AS is peeled. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013122958(A) 申请公布日期 2013.06.20
申请号 JP20110270136 申请日期 2011.12.09
申请人 LINTEC CORP 发明人 TAKANO TAKESHI
分类号 H01L21/683;H01L21/301 主分类号 H01L21/683
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