发明名称 |
LINEARITY ENHANCEMENT OF CAPACITIVE TRANSDUCERS BY AUTO-CALIBRATION USING ON-CHIP NEUTRALIZATION CAPACITORS AND LINEAR ACTUATION |
摘要 |
A system and method are disclosed for automatically calibrating capacitive transducers to neutralize feed-through capacitance using linear actuation. The method includes starting with an initial neutralization capacitance, applying no electrostatic force and two known electrostatic forces to a proof mass of the transducer, recording the transducer output changes due to the applied forces; and determining how to revise neutralization capacitance based on the changes. The method can use a binary search to find a final neutralization capacitance providing the best linearity. The method can include comparing the final linearity to a threshold linearity. The electrostatic forces can be applied using a charge control method where the electrostatic force is a linear function of the actuation duration. The linear actuation can be used for continuous self-test of capacitive sensors.
|
申请公布号 |
US2013152663(A1) |
申请公布日期 |
2013.06.20 |
申请号 |
US201213551408 |
申请日期 |
2012.07.17 |
申请人 |
BALACHANDRAN GANESH;PETKOV VLADIMIR;ROBERT BOSCH GMBH |
发明人 |
BALACHANDRAN GANESH;PETKOV VLADIMIR |
分类号 |
G01P21/00 |
主分类号 |
G01P21/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|