发明名称 PRODUCTION EFFICIENCY IMPROVEMENT SYSTEM, PRODUCTION EFFICIENCY IMPROVEMENT DEVICE AND PRODUCTION EFFICIENCY IMPROVEMENT METHOD
摘要 <p>[Problem] To provide a production efficiency improvement system, a production efficiency improvement device and a production efficiency improvement method that are capable of reducing the energy consumption of a transportation device. [Solution] A production efficiency improvement device (4) comprises a device location map (41), a first device selection unit (42), a second device selection unit (43) and a device response unit (44). Because a processing device (5) that performs a process is selected in consideration of the placement of each of multiple processing devices (5), the transportation distance of the transportation device (7b) is capable of being shortened, and energy consumption is capable of being reduced as a result.</p>
申请公布号 WO2013088865(A1) 申请公布日期 2013.06.20
申请号 WO2012JP78923 申请日期 2012.11.08
申请人 TOKYO ELECTRON LIMITED 发明人 MIZUTANI TAKU;NAMIOKA ICHIRO;IIJIMA TOSHIHIKO;TODATE SHIGENORI
分类号 H01L21/02;H01L21/677 主分类号 H01L21/02
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