| 摘要 |
<p>Provided is an X-ray detection device that enables detection of the condition of a connection section between a substrate and a component in the direction of intersection with the substrate surface. An x-ray detection device (100) is provided with an x-ray source (3) for emitting x-rays to a substrate (10) onto which a component (10a) is mounted, an x-ray image pickup unit (4) for picking-up images on the basis of the x-rays emitted onto the substrate, and a control unit (12) that detects the state of a connection section (10b) between the component and the substrate. The control unit is configured so that by emitting x-rays from a direction that intersects a target surface, which includes the target connection-section and which intersects a surface of the substrate, in order to pick up an image-pickup-surface image, and converting this image to a target-surface image by coordinate transformation, the connection shape of the connection section between the component on the target surface and the substrate is acquired.</p> |
