WAFER ALIGNMENT APPARATUS

摘要

PURPOSE: A wafer alignment apparatus is provided to match each flat zone of a plurality of wafer which is laminated, thereby aligning the wafer constantly and repetitively. CONSTITUTION: A wafer alignment apparatus comprises a supporting unit(10), and a pushing unit(20). The supporting unit supports a plurality of laminated wafer(w,w'). The pushing unit pushes each flat zone of a plurality of wafer and aligns a plurality of wafer to overlap and match each flat zone of a plurality of wafer.