发明名称 RARE EARTH ELEMENT FLUORIDE SPRAY POWDER AND RARE EARTH ELEMENT FLUORIDE-SPRAYED ARTICLE
摘要 <P>PROBLEM TO BE SOLVED: To obtain a rare earth element fluoride spray powder which is suitable for atmospheric plasma spraying, and to provide a rare earth fluoride-sprayed article produced using the rare earth element fluoride spray powder, which undergoes few partial color changes and can achieve its original long service life when used as a plasma resistant article in a halogen gas plasma. <P>SOLUTION: The powder includes rare earth element fluoride particles having an aspect ratio of up to 2, an average particle size of 10 to 100 &mu;m, a bulk density of 0.8 to 1.5 g/cm<SP POS="POST">3</SP>, and a carbon content of 0.1 to 0.5 mass%. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013122086(A) 申请公布日期 2013.06.20
申请号 JP20120238894 申请日期 2012.10.30
申请人 SHIN-ETSU CHEMICAL CO LTD 发明人 HAMAYA NORIAKI;MAEDA TAKAO;TAKAI YASUSHI
分类号 C23C4/04;H01L21/3065 主分类号 C23C4/04
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