摘要 |
<P>PROBLEM TO BE SOLVED: To obtain a rare earth element fluoride spray powder which is suitable for atmospheric plasma spraying, and to provide a rare earth fluoride-sprayed article produced using the rare earth element fluoride spray powder, which undergoes few partial color changes and can achieve its original long service life when used as a plasma resistant article in a halogen gas plasma. <P>SOLUTION: The powder includes rare earth element fluoride particles having an aspect ratio of up to 2, an average particle size of 10 to 100 μm, a bulk density of 0.8 to 1.5 g/cm<SP POS="POST">3</SP>, and a carbon content of 0.1 to 0.5 mass%. <P>COPYRIGHT: (C)2013,JPO&INPIT |