| 发明名称 |
PROCESS FOR PRODUCTION OF SILANE AND HYDROHALOSILANES |
| 摘要 |
Embodiments of a system and process for the production of ultra-high purity silane and hydrohalosilanes of the general formula HySiX4-y (y=1, 2, or 3) by a reactive distillation method are disclosed.
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| 申请公布号 |
US2013156675(A1) |
申请公布日期 |
2013.06.20 |
| 申请号 |
US201113328820 |
申请日期 |
2011.12.16 |
| 申请人 |
BRENEMAN WILLIAM C.;REC SILICON INC |
发明人 |
BRENEMAN WILLIAM C. |
| 分类号 |
C01B33/107;B01J7/00;C01B33/04 |
主分类号 |
C01B33/107 |
| 代理机构 |
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