发明名称 MICROSTRUCTURE TRANSCRIPTION APPARATUS
摘要 A microstructure transcription apparatus for transcribing microscopic concave-convex patterns on a body to be transcribed includes a stamper, on a surface of which is formed microscopic concave-convex pattern; and a stamper holder portion, which holds the stamper. The stamper holder portion includes a transparent backup member, a stamper backup elastic body attached on the backup portion covering over a central portion thereof, a space, into which a negative pressure is introduced for absorbing said stamper to hold, and a member, which is formed surrounding said stamper holder portion therein and contacts on an outer peripheral portion of said stamper. The contact member is movable with respect to the backup member, and thereby a curvature of a curved surface of said stamper to be suppressed onto said stamper backup elastic body is changeable, enabling to alter a curvature of a spherical shape on the surface of the stamper when transcribing.
申请公布号 US2013156878(A1) 申请公布日期 2013.06.20
申请号 US201213689803 申请日期 2012.11.30
申请人 HITACHI HIGH-TECHNOLOGIES CORPORATION;HITACHI HIGH-TECHNOLOGIES CORPORATION 发明人 SHIRAISHI TOSHIMITSU;YAMASHITA NAOAKI;SHIZAWA NORITAKE;NAGAKURA TSUTOMU
分类号 B29C59/02 主分类号 B29C59/02
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