LAMINATED SUBSTRATE-SCRIBING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a laminated substrate-scribing apparatus usable for a substrate processing system where a unit display panel arranged on a mother board comprising a laminated substrate in prescribed layout can be taken out without damaging a terminal region.

SOLUTION: A scribe apparatus control section is provided which adjusts the depths of three scribe grooves formed at specified boundaries and controls an end material region at a position facing the terminal region to be left at specified positions, at the time of scribe-processing the specified boundaries which include the terminal region. Thus, separation is ensured even a terminal has a narrow width.

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