发明名称 Test Structures, Methods of Manufacturing Thereof, Test Methods, and MRAM Arrays
摘要 Test structures, methods of manufacturing thereof, test methods, and magnetic random access memory (MRAM) arrays are disclosed. In one embodiment, a test structure is disclosed. The test structure includes an MRAM cell having a magnetic tunnel junction (MTJ) and a transistor coupled to the MTJ. The test structure includes a test node coupled between the MTJ and the transistor, and a contact pad coupled to the test node.
申请公布号 US2013155759(A1) 申请公布日期 2013.06.20
申请号 US201113328953 申请日期 2011.12.16
申请人 KAO YA-CHEN;CHIANG TIEN-WEI;LIN CHUN-JUNG;TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 KAO YA-CHEN;CHIANG TIEN-WEI;LIN CHUN-JUNG
分类号 G11C11/14;G11C29/00;H01L23/58;H01L43/12 主分类号 G11C11/14
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