| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a data processing device for scanning probe microscopes, capable of improving operability and workability by performing display so that a user can easily grasp existence, etc., of an area of interest and an abnormal value when analysing a structure on the basis of three-dimensional data obtained by a SPM enabling measurement of a three-dimensional force distribution and the like in a space at the vicinity of a solid surface. <P>SOLUTION: A user suitably moves and rotates a cut plane 51 (for example, a X-Y plane) to be checked and indicates it to a stereo object 50 displaying a data value at each position in a three-dimensional space according to a color scale. A display processing part creates and displays an unevenness image 53 having undulations in a Z-axis direction on the basis of each data value positioned on a two-dimensional distribution image 52 cut by the plane 51. Since an abnormal value in the data is expressed as a part recessed or protruded remarkably, the user can easily visually recognize a part with the abnormal value, and perform correction, etc., of the abnormal value by correcting the data of a place indicated on the unevenness image 53 by a click operation using surrounding data. <P>COPYRIGHT: (C)2013,JPO&INPIT |
