发明名称 METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要 The objective of the present invention is to provide a method of manufacturing a semiconductor device having less contamination of a semiconductor chip and good productivity. The present invention is a method of manufacturing a semiconductor device having a semiconductor chip, with the steps of preparing a plurality of semiconductor chips, preparing a resin sheet having a thermosetting resin layer, arranging the plurality of semiconductor chips on the thermosetting resin layer, arranging a cover film on the plurality of semiconductor chips, and embedding the plurality of semiconductor chips in the thermosetting resin layer by a pressure applied through the arranged cover film, in which the contact angle of the cover film to water is 90° or less.
申请公布号 US2013157419(A1) 申请公布日期 2013.06.20
申请号 US201213718821 申请日期 2012.12.18
申请人 NITTO DENKO CORPORATION;NITTO DENKO CORPORATION 发明人 SHIMIZU YUSAKU;AKIZUKI SHINYA;ODA TAKASHI;TOYODA EIJI;MATSUMURA TAKESHI
分类号 H01L21/56 主分类号 H01L21/56
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