发明名称 NANOPOROUS VACUUM PUMP
摘要 The invention provides an element (12), comprising: a nanoporous insulating film (20) (such as a thin nanoporous diamond film) and first and second conducting layers (18a, 18b) on first and second opposed sides respectively of the film (20). Also provided are a vacuum pump (10), an ion source (80) and an ion trap (98), each comprising such an element (12).
申请公布号 US2013153763(A1) 申请公布日期 2013.06.20
申请号 US201113704959 申请日期 2011.06.17
申请人 SAINT ANDREW;GBC SCIENTIFIC EQUIPMENT PTY. LTD. 发明人 SAINT ANDREW
分类号 F04B37/10;H01J27/02;H01J49/02;H01J49/10 主分类号 F04B37/10
代理机构 代理人
主权项
地址