发明名称 |
ELECTRODE SYSTEM, IN PARTICULAR FOR GAS DISCHARGE LIGHT SOURCES |
摘要 |
<p>The present invention relates to an electrode system, in particular of a gas discharge device for generating EUV radiation and/or soft X-rays. The electrode system comprises at least two electrodes (1, 2) formed of an electrode material which contains Mo or W or an alloy of Mo or W as a main component. The electrode material has a fine grained structure with fine grains having a mean size of <500 nm. With the proposed electrode system, a high thermo-mechanical and thermo-chemical resistance of the electrodes is achieved. The electrode system can therefore be used in known EUV light sources using liquid Sn and being operated at high temperatures.</p> |
申请公布号 |
EP2494854(B1) |
申请公布日期 |
2013.06.19 |
申请号 |
EP20100765684 |
申请日期 |
2010.09.29 |
申请人 |
KONINKLIJKE PHILIPS ELECTRONICS N.V.;PHILIPS INTELLECTUAL PROPERTY & STANDARDS GMBH;XTREME TECHNOLOGIES GMBH |
发明人 |
METZMACHER, CHRISTOF;JONKERS, JEROEN;APETZ, ROLF, T., A. |
分类号 |
H05G2/00;H01J1/02 |
主分类号 |
H05G2/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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