发明名称 ANTIREFLECTIVE COMPOSITIONS FOR PHOTORESISTS
摘要 The present invention relates to a coating solution comprising a polymer obtained by reacting a glycoluril compound with at least one reactive compound containing at least one hydroxy group and/or at least one acid group, and further where the polymer is soluble in an organic solvent. The invention also relates to a process for imaging a photoresist coated over such a coating composition and to a polymer for the coating composition.
申请公布号 KR101270508(B1) 申请公布日期 2013.06.19
申请号 KR20077008453 申请日期 2005.09.15
申请人 发明人
分类号 C08F8/00;G03C5/00;G03F7/09 主分类号 C08F8/00
代理机构 代理人
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