发明名称
摘要 PROBLEM TO BE SOLVED: To provide a photosensitive ceramic composition which can form via holes with a high aspect ratio and high definition by using a photolithographic process and which has a low dielectric constant after firing. SOLUTION: The photosensitive ceramic composition contains at least inorganic particles having a hollow structure and contains a photosensitive organic component as an essential component.
申请公布号 JP5217069(B2) 申请公布日期 2013.06.19
申请号 JP20010252542 申请日期 2001.08.23
申请人 发明人
分类号 C04B35/14;G03F7/004;C04B35/16;H05K1/03;H05K3/46 主分类号 C04B35/14
代理机构 代理人
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