| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor testing apparatus capable of improving testing efficiency by shortening a startup time. SOLUTION: The semiconductor testing apparatus 1 includes a tester controller 10 for controlling the semiconductor testing apparatus 1 in an integral manner, and a redundancy system 20 which performs redundancy operations using the result of testing a semiconductor device. The redundancy system 20 includes a plurality of redundancy operating devices 40a-40n which perform redundancy operations while an operating system (OS) is started, and a redundancy controller 30 for controlling the redundancy operating devices. When the semiconductor testing apparatus 1 is powered on, the tester controller 10 directly transfers a compressed OS 12, i.e., a compressed OS for use at the redundancy controller 30 and the redundancy operating devices 40a-40n, to the redundancy controller 30 and the redundancy operating devices 40a-40n via a bus B. COPYRIGHT: (C)2010,JPO&INPIT |
