Electrically conductive SiNx ceramic composite, its sputtering targets and manufacturing methods thereof

摘要

A ceramic composite material comprising an aggregate chemical composition of SiNx, wherein x is between 0.2 and 1.30, a dispersed phase of Si 3 N 4 particles, and a continuous phase of doped or intrinsic Si, wherein the dispersed phase of Si 3 N 4 particles is imbedded in the continuous phase of doped or intrinsic Si. A method of forming a ceramic composite material, the method comprising: preparing a mixture comprising x wt.% of ±- Si 3 N 4 , y wt.% of undoped silicon, w wt.% of doped silicon, and z wt.% of boron, wherein x > 0, y ‰¥ 0, z ‰¥ 0, w ‰¥ 0 and wherein if y > 0 then z > 0; and forming a green body from the mixture.