| 摘要 |
The invention provides a coating apparatus and a coating method. When a front end of a substrate G approaches a set position (start position for coating) near an area just below a resist nozzle (78), transferring of the substrate is stopped for a second inspection. An optical distance sensor (162) measures distances (Ld, Le) above and below the substrate G. Then, measured values of thickness D ofthe substrate and floating height Hb are compared to their set values or fiducial values [D] and [Hb]. If absolute values of [D]-D and [Hb]-Hb are within the preset range, 'normal' is obtained, otherwise 'abnormal' is obtained. Thus the time for coating the substrate with a treating solution through non-revolving coating method with floating-transferring manner is shortened, the position relationship for heights of a floating table, the substrate and the nozzle is properly managed, and a coating film of the treating solution can be formed with uniform film thickness on the substrate. |
