| 摘要 |
A series of nominally identical workpieces is received from a manufacturing process and measured on a measuring apparatus. They are received at a non-ambient temperature because of heat introduced during the manufacturing process, but they are placed on the measuring apparatus in a repeatable manner, e.g. by a robot, such that their non-ambient temperatures when measured are repeatable. One of the workpieces is measured as a reference workpiece at the non-ambient temperature, and these measurements are compared to calibrated values obtained from an external source, in order to generate an error map or error function. The error map or error function is used to correct measurements of subsequent workpieces of the series which are measured at the repeatable non-ambient temperature. |
