MEMS composite beam

摘要

The composite beam 34 comprises multiple layers of metal and metal oxide. A single anisotropic reactive ion etch step is used to ensure that the edges of the beam layers are self aligned. Sacrificial oxide material 44 from around the beam is removed via the vent 48 using HF or xenon difluoride etchant. The MEMS beam may be used in a MEMS switch for mode switching of power amplifiers or analogue and mixed signal applications.