DISCHARGE RADIATION SOURCE, IN PARTICULAR UV RADIATION

摘要

The invention concerns a radiation source, comprising an anode ( 2 ), a cathode ( 3 ), an electric discharge gap ( 4 ) between the anode ( 2 ) and the cathode ( 3 ) and a gas input conduit ( 30 ) in the discharge gap ( 4 ). The gas input conduit ( 30 ) is electrically connected to the anode and the cathode. The invention is characterized in that the gas input conduit ( 30 ) is supplied with gas by a gas supply conduit ( 32 ), designed to form between its portion ( 42 ) connected to the gas input conduit ( 30 ) and another of its portions connected to a fixed potential, an electric impedance such that it counters the generation of electric discharges inside the gas input conduit ( 30 ).