Glass substrate processing device using laser beam with rotation of multi-spot focused beams

摘要

A processing device is configured to irradiate a laser beam onto a glass substrate for processing. The processing device has a work table (2), a laser beam output section, a multi-spot focus section, a rotation drive mechanism, an optical system, and a laser beam scan section. The multi-spot focus section receives a laser beam, and splits and focuses the laser beam inputted therein into a plurality of beam focus spots. The rotation drive mechanism rotates the plurality of beam focus spots about a single center axis that is arranged in a center of the plurality of beam focus spots. The optical system guides the laser beam to the multi-spot focus section. The laser beam scan section moves all the plurality of beam focus spots rotating about the single center axis in a desired direction within a predetermined range of a plane arranged along a surface of the glass substrate.