| 摘要 |
PURPOSE: A polarized light irradiation apparatus is provided to prevent unevenness of a polarization axis of a polarized light even though a filter is arranged at an incident side of a wire grid polarization device. CONSTITUTION: A polarized light irradiation apparatus includes a linear light source, a wire grid polarization device(81), a light source comprising a reflection mirror(12) and a filter(90). The wire grid polarization device polarizes and irradiates a light from the light source. The light source comprising the reflection mirror covers the light source at an opposite side to the side where the wire grid polarization device is installed. The filter is formed on an optical path between the wire grid polarization device. The filter is larger than the wire grid polarization device when it is seen from width direction in parallel with a light irradiation plane and vertical to length direction of the light source. [Reference numerals] (AA) Cooling water output; (BB) Cooling water input |
