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发明名称
摘要
申请公布号
JP5217064(B2)
申请公布日期
2013.06.19
申请号
JP20070190388
申请日期
2007.07.23
申请人
发明人
分类号
H01L21/336;H01L29/78
主分类号
H01L21/336
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