| 摘要 |
To provide a photocatalytic titanium oxide film having high photocatalytic properties, at low temperatures, quickly, and inexpensively, a seed layer comprising a noncrystalline metal compound film is formed on the surface of a base, which is made from glass, plastic or the like, and a crystalline metal compound film is formed by columnar growth on the seed layer; in producing this film, the photocatalytic titanium oxide film is produced by way of sputtering, at low cost, by way of low temperature and high speed film formation, without pre-processing with a plasma of an active gas, without post-processing, and without heat treatment. |
