SUBSTRATE INSPECTING APPARATUS AND SUBSTRATE INSPECTING METHOD

摘要

PURPOSE: A substrate inspection apparatus and a substrate inspection method are provided to reduce failure inspection time of a substrate and substrate damage. CONSTITUTION: A substrate inspection apparatus(100) includes a first inspection unit(110) and a second inspection unit(120). The first inspection unit contacts an inspection pin to an inspection terminal connected to each circuit formed on a substrate, simultaneously performs a first failure inspection about the circuit and determines failure by each circuit. The second inspection unit performs a second failure inspection about a circuit judged as failure by the first failure inspection of the first inspection unit. The second inspection unit performs the second failure inspection and judges the final failure. [Reference numerals] (100) Substrate inspection apparatus; (110) First inspection unit; (120) Second inspection unit