| 摘要 |
A flow rate control device includes: a fuel gas supply channel (11) having a flow rate adjusting valve (2); a thermal type mass flow rate sensor (3) arranged in the supply channel (11); a calculation unit (6) which calculates a thermal quantity flow rate (Fc) of the fuel gas defined by a product of a volume flow rate (Fv) of the fuel gas and a heat generation quantity (Qv) per unit volume of the fuel gas according to an output from the thermal type sensor (3); and a flow rate control unit (5) which controls the open degree of the flow rate adjusting valve (2) according to a difference between a control target value (Fo) for controlling the thermal quantity flow rate (Fc) and the thermal quantity flow rate (Fc) calculated by the calculation unit (6). |
